Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Characterizaton, Parameter Extraction, Calibration Chapter 8

Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force

Authors: T. Lam and R.B. Darling

Affilation: University of Washington, United States

Pages: 418 - 421

Keywords: stiction, cantilever beams, finite element method

A finite element model is combined with experimental data to extract the stiction force in MEMS cantilever beams. The model predicts cantilever behaviors both before and after snap-down has occurred. Experimental measurements of cantilevers have been performed to validate the model. With a reliable model and additional experimental data the stiction force between surfaces of MEMS devices can be extracted to predict device behavior or for process control.

ISBN: 0-9708275-0-4
Pages: 638