Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Characterizaton, Parameter Extraction, Calibration Chapter 8

Mechanical Property Measurement of Thin-film Gold Using Thermally Actuated Bimetallic Cantilever Beams

Authors: V.K. Pamula, A. Jog and R.B. Fair

Affilation: Duke University, United States

Pages: 410 - 413

Keywords: finite element methods, thin film, gold, Young's modulus, Poisson's ratio

We describe a method for estimating the Young's modulus of thin-film gold deposited on the poly2 layer in the MUMPS process is described. An optical detection system employing position sensitive detectors (PSD) is built to measure the bimetallic (gold/poly2) cantilever deflection with increasing temperature. Measured cantiliver deflections are compared to finite element simulations performed with MEMCAD(TM) which show an excellent match for a Young's modulus of 78 GPa and a Poisson's ratio of 0.35.

ISBN: 0-9708275-0-4
Pages: 638