Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Characterizaton, Parameter Extraction, Calibration Chapter 8

Parameter Extraction for Surface Micromachining Using Eelectrical Characterization of Sensors

Authors: M. Maute, S. Kimmerle, J. Franz, J. Hauer, D. Schubert, H.-R. Krauss and D.P. Kern

Affilation: Robert Bosch GmbH, Germany

Pages: 406 - 409

Keywords: accelerometer, micromachining, parameter extraction, CV-characteristic

This paper presents a novel methodology for the extraction of process dependent geometrical parameters of surface micromachined sensors. This approach is based on the electrical measurement of static capacitance-voltage characteristics of the sensor element on wafer level. This extraction technique is demonstrated using a surface micromachined inertial accelerometer: a) The measurement of the capacitance-voltage characteristic (CV-characteristic) for lateral actuation of the suspended proofmass results in the extraction of a parameter related both to the thickness of the functional polysilicon layer and the lateral sidewall overetch due to the etch process of the polysilicon [1]. b) For vertical actuation of the proofmass, measurements of CV-characteristics lead to an extracted parameter that is proportional to the sidewall difference angle of the beam cross-section.

ISBN: 0-9708275-0-4
Pages: 638