Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Characterizaton, Parameter Extraction, Calibration Chapter 8

3-D Computational Modeling of RF MEMS Switches

Authors: H.D. Espinosa, M. Fischer, Y. Zhu and S. Lee

Affilation: Northwestern University, United States

Pages: 402 - 405

Keywords: MEMS, computational mechanics, experimental mechanics, elasticity, radio frequency

Young's modulus and residual stress state of freestanding thin membranes are characterized in this work by means of wafer level experimental techniques. RF MEMS Switches manufactured by Raytheon Systems Co. are investigated using a new method that combine

ISBN: 0-9708275-0-4
Pages: 638