Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Characterizaton, Parameter Extraction, Calibration Chapter 8

Stress Measurement in MEMS Devices

Authors: L. Starman Jr., J. Busbee, J. Reber, J. Lott, W. Cowan and N. Vandelli

Affilation: Wright-Patterson AFB, United States

Pages: 398 - 401

Keywords: MEMS, Raman spectroscopy, residual stress, MUMPs, Young's modulus

Due to the unique structure and small scale of Micro-Electro-Mechanical Systems (MEMS), residual stresses during the deposition processes can have a profound affect on the functionality of the MEMS structures. Typically, material properties of thin films

ISBN: 0-9708275-0-4
Pages: 638