Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Multiple Solutions in Electrostatic MEMS

Authors: J.A. Pelesko

Affilation: Georgia Institute of Technology, United States

Pages: 290 - 293

Keywords: electrostatic actuation, pull-in, instability, semilinear elliptic problem

The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady s

ISBN: 0-9708275-0-4
Pages: 638

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