Authors: W.O. Davis and A.P. Pisano
Affilation: University of California, Berkeley, United States
Pages: 270 - 273
Keywords: MEMS, gyroscope, nonlinear, suspension
We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion amplitude prior to the onset of nonlinear behavior. The analysis is applied in detail to a microgyroscope. Comparisons with a finite element model and experimental data are used to validate the analysis, and issues pertaining to the optimal design of the gyroscope's suspension are investigated.