Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

Authors: W.O. Davis and A.P. Pisano

Affilation: University of California, Berkeley, United States

Pages: 270 - 273

Keywords: MEMS, gyroscope, nonlinear, suspension

We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion amplitude prior to the onset of nonlinear behavior. The analysis is applied in detail to a microgyroscope. Comparisons with a finite element model and experimental data are used to validate the analysis, and issues pertaining to the optimal design of the gyroscope's suspension are investigated.

ISBN: 0-9708275-0-4
Pages: 638