Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Eigenvalue Analysis of Tunable Micro-mechanical Actuator

Authors: W-S. Lee, K-C. Kwon, B-K. Kim, J-H. Cho and S-K. Youn

Affilation: KAIST, Korea

Pages: 378 - 381

Keywords: electrostatic, frequency shifting, numerical method, coupled analysis

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic for

ISBN: 0-9708275-0-4
Pages: 638