Authors: C.D. Lott, T.W. McLain, J.N. Harb and L.L. Howell
Affilation: Brigham Young University, Germany
Pages: 370 - 373
Keywords: microactuator, thermomechanical actuator
The thermal behavior of a thermomechanical in-plane microactuator is modeled using a finite-difference approach. Steady-state temperature profiles from the model are presented for a microactuator operating in air and a vacuum. The model is validated by comparing the actuator displacements predicted by the model with those obtained experimentally. Initial results demonstrate significant improvements in the steady-state efficiency of the microactuator when it is operated in a vacuum.
Nanotech Conference Proceedings are now published in the TechConnect Briefs