Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator

Authors: C.D. Lott, T.W. McLain, J.N. Harb and L.L. Howell

Affilation: Brigham Young University, Germany

Pages: 370 - 373

Keywords: microactuator, thermomechanical actuator

The thermal behavior of a thermomechanical in-plane microactuator is modeled using a finite-difference approach. Steady-state temperature profiles from the model are presented for a microactuator operating in air and a vacuum. The model is validated by comparing the actuator displacements predicted by the model with those obtained experimentally. Initial results demonstrate significant improvements in the steady-state efficiency of the microactuator when it is operated in a vacuum.

ISBN: 0-9708275-0-4
Pages: 638