Authors: E. Weiss, E.G. Welp, U. Witzel, A. Wieck and E. Schmidt
Affilation: Ruhr University Bochum, Germany
Pages: 366 - 369
Keywords: micromechanics, diaphragm, standardization, finite element method, FEM computation membrane
Although certain components (such as diaphragms or beams) are used recurrently in micromechanics, the degree of standardization of components that is familiear in classic mechanical engineering is still to a great extent unknown in this field. This is due in part to the scope of MEMS for integrating the mechanics and the (evaluation) electronics together on a single chip (monolithic integration). This paper presents a form of standardization of micromechanical components, using micromechanical diaphragms as an illustration. This involves defining various diaphragm sizes and shapes as standard, and adapting them to individual tasks by modifying them with specific additional elements. This modular principle permits standardization despite monolithic integrations.
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