Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Investigation into the Standardization of Micromechanical Components and their Simulation and Computation Using FEM -- Case Study of Diaphragms

Authors: E. Weiss, E.G. Welp, U. Witzel, A. Wieck and E. Schmidt

Affilation: Ruhr University Bochum, Germany

Pages: 366 - 369

Keywords: micromechanics, diaphragm, standardization, finite element method, FEM computation membrane

Although certain components (such as diaphragms or beams) are used recurrently in micromechanics, the degree of standardization of components that is familiear in classic mechanical engineering is still to a great extent unknown in this field. This is due in part to the scope of MEMS for integrating the mechanics and the (evaluation) electronics together on a single chip (monolithic integration). This paper presents a form of standardization of micromechanical components, using micromechanical diaphragms as an illustration. This involves defining various diaphragm sizes and shapes as standard, and adapting them to individual tasks by modifying them with specific additional elements. This modular principle permits standardization despite monolithic integrations.

ISBN: 0-9708275-0-4
Pages: 638