Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives

Authors: M. Jianqiang, C. Shixin and L. Yi

Affilation: Data Storage Institute, Singapore

Pages: 350 - 353

Keywords: single crystal silicon, microactuator, simulation, hard disk drive

The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from a single cryst

ISBN: 0-9708275-0-4
Pages: 638

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