Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Development of Patterned SMA Strips as Self-Heating Resistors

Authors: J. Chen, B.C. Cai, D. Xu, L. Wang and X.L. Cheng

Affilation: Shanghai Jiao Tong University, Singapore

Pages: 322 - 325

Keywords: MEMS, Membrane microactuator, Micropump, Shape memory effect, Finite element analyses

A way to develop the pattern of shape memory alloys (SMA) titanium-nickel (TiNi) strips for improving the actuation performance of membrane microactuator is described in this paper. The patterned SMA strips serve not only as structural parts but also as heating resistors. Two different kinds of pattern designs are proposed and comparatively analyzed with finite element analysis (FEA) software ANSYS. Thermal-structural analysis is performed on the basis of maximum deflection potential. Coupled electro-thermal analysis is performed to investigate the effect of patterning of the SMA strips especially on the characteristics of temperature behavior. The planar pattern of the SMA strips for nonuniform heat generation rate are suggested so as homogeneous temperature variations can be obtained in the SMA thin films allowing an optimized use of the shape memory effect.

ISBN: 0-9708275-0-4
Pages: 638