Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Thermal Frequency Drift of Resonant Microsensor

Authors: F. Shen, P. Lu, S.J. O'Shea, K.H. Lee, S.C. Pradhan and T.Y. Ng

Affilation: Institute for High Performance Computing, Singapore

Pages: 298 - 301

Keywords: microsensor, silicon cantilever, resonant frequency, frequency drift, temperature difference

Thermal effects on the resonant frequency drift of a microsensor (a silicon cantilever beam with a gold coating) are studied. Two cases are investigated using analytical methods: uniform temperature distribution and linear temperature distribution along the length of the sensor. It is found that the thermal frequency drift is dominated by the temperature-dependent material properties. Thermal frequency drift also depends on the ratio of the thickness of the gold coating and the thickness of the silicon cantilever. The results show that the relationship between thermal frequency drift and the ratio of gold-to-silicon thickenss is nearly linear.

ISBN: 0-9708275-0-4
Pages: 638