Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 7

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Authors: S. Basrour, H. Majjad, J.R. Coudevylle and M. de Labachèlerie

Affilation: CNRS, France

Pages: 294 - 297

Keywords: MEMS, resonator, Lamé, FEA, UV-LIGA

This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods of such device are presented and validated by the use of Finite Element Analysis (FEA). Details on the fabrication process are also exposed. The vibration modes are detected with an optical interferometer and preliminary results are presented. A comparison between experiments and numerical predictions are finally discussed.

ISBN: 0-9708275-0-4
Pages: 638