Authors: S. Basrour, H. Majjad, J.R. Coudevylle and M. de Labachèlerie
Affilation: CNRS, France
Pages: 294 - 297
Keywords: MEMS, resonator, Lamé, FEA, UV-LIGA
This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods of such device are presented and validated by the use of Finite Element Analysis (FEA). Details on the fabrication process are also exposed. The vibration modes are detected with an optical interferometer and preliminary results are presented. A comparison between experiments and numerical predictions are finally discussed.