Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Optimization Chapter 5

Microsystem Model Evaluation Using Optimization Strategies

Authors: D. Peters and R. Laur

Affilation: University of Bremen, Germany

Pages: 161 - 164

Keywords: behavioral modeling, model evaluation, opti-mization, microsystem design

This paper presents an automatic approach for evaluating behavioral models of micro systems' components. Optimization methods are applied aiming at the specification of a model's scope of application. The method is presented by evaluating a behavioral model of a capacitive pressure sensor. The model incorporates a new approach for the calculation of the sensor's bending line. It considers small as well as large deflections.

ISBN: 0-9708275-0-4
Pages: 638