Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Optimization Chapter 5

Computer-Aided Kinematic Design of a Torsional Ratcheting Actuator

Authors: E. Sacks and S.M. Barnes

Affilation: Purdue University, United States

Pages: 144 - 147

Keywords: MEMS, micro-mechanical design, configu-ration space, Summit

We have developed an interactive computer-aided design program that supports the mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation and kinematic tolerance analysis, and supports kinematic synthesis. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to redesign and validate a torsional ratcheting actuator fabricated at Sandia with the SUMMiT V process.

ISBN: 0-9708275-0-4
Pages: 638