Authors: G. Casinovi
Affilation: Georgia Institute of Technology, United States
Pages: 112 - 115
Keywords: efficient simulation, element stamps, HDL, MEMS
This paper describes an approach to MEMS simulation based on so-called element stamps, which are the building blocks of conventional circuit simulators. Stamps are derived from lumped-constant models of individual electromechanical devices, and built into the simulator. When a system is simulated, the equations describing its behavior can be built and solved in a systematic and efficient way using the stamps of its constitutive elements. This makes the simulation faster and more efficient, compared to simulators that rely on models written in hardware description languages. Numerical results obtained from the simulation of a simple electromechanical system containing a linear comb-drive accelerometer are presented.
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