Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

System Level Modeling Chapter 4

Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels

Authors: T. Veijola

Affilation: Helsinki University of Technology, Finland

Pages: 96 - 99

Keywords: gas flow in rectangular channels, slip flow, gas flow in microstructures, acoustic impedance, oscillating gas flow

Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the acoustic impedance of a rectangular flow channel. Utilizing these models, acoustic impedance circuits can be constructed to model damping problems, such as the squeezed-film damping of fast oscillating microstructures with dimensions comparable to the mean free path.

ISBN: 0-9708275-0-4
Pages: 638

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