Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Compact Modeling and Model Order Reduction Chapter 3

A Design Approach for Robustness Improvement of Rate Gyroscopes

Authors: C. Acar and A. Shkel

Affilation: University of California Irvine, United States

Pages: 80 - 83

Keywords: MEMS, inertial sensors, micromachined gyroscopes

This paper reports a design concept for robustness improvement of micromachined gyroscopes. The novelty of the approach is in expanding the design space of the device by increasing the degrees-of-freedom (DOF) of the system. The approach facilitates the use of two independently oscillating proof masses instead of one as is done in classical designs. Utilization of the dynamic amplification approach in the 4 DOF system eliminates the necessity of operating the device in the resonance mode. Simulations indicate over 15 times increase in the bandwidth of the system, which demonstrates a significantly improved robustness against structural and thermal parameter fluctuations over the operating time of the device.

ISBN: 0-9708275-0-4
Pages: 638