Authors: T. Veijola, K. Ruokonen and I. Tittonen
Affilation: Helsinki University of Technology, Finland
Pages: 76 - 79
Keywords: gas damping, damping in microstructures, Reynolds equation, acoustic impedance, fringe flow
A numerical model for the squeezed-film damping between moving rigid, rectangular surfaces is presented. The emphasis is on the nontrivial boundary conditions for the flow, accounting for the finite acoustic impedance of the surrounding gas at the borders. The previously published electrical-equivalent macro model is modified to account for the end effects. The model is usable in simulating the circuit level and the system level behavior of gas-damped devices in the time- and frequency domains.