Authors: V. Srinivasan, A. Jog and R.B. Fair
Affilation: Duke University, United States
Pages: 72 - 75
Keywords: reduced-order model, MEMS, macromodels, Krylov subspaces.
A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under consideration. The entire methodology is implemented in a symbolic computation environment to preserve dependencies on physical device parameters. The macromodeling methodology is demonstrated using the combdrive microresonator as a representative example. The results are compared with analytical models, NODAS and finite element simulations.