Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Compact Modeling and Model Order Reduction Chapter 3

Scalable Macromodels for Microelectromechanical Systems

Authors: V. Srinivasan, A. Jog and R.B. Fair

Affilation: Duke University, United States

Pages: 72 - 75

Keywords: reduced-order model, MEMS, macromodels, Krylov subspaces.

A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under consideration. The entire methodology is implemented in a symbolic computation environment to preserve dependencies on physical device parameters. The macromodeling methodology is demonstrated using the combdrive microresonator as a representative example. The results are compared with analytical models, NODAS and finite element simulations.

ISBN: 0-9708275-0-4
Pages: 638