Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Numerics, Algorithms Chapter 2

Moment-based Analysis of Mechanical Effects on Trench-Hall Devices

Authors: S. Taschini, J.G. Korvink and H. Baltes

Affilation: ETH Zürich, Switzerland

Pages: 15 - 18

Keywords: Hall effect, finite-element method, moment expansion, mechanical stress

This paper presents a novel method for the assessment of mechanical effects on trench-Hall devices based on a moment expansion combined with two-dimensional finite-element discretization. Analogously to plate theories, a truncated moment expansion of the equations in the transverse coordinate is used to approximate the three dimensional problem. The resulting limited set of two-dimensional problems is discretized by means of finite-elements. The parametrization of the procedure lends itself to the optimization of the device geometry, therefore representing a valuable tool for the designer.

ISBN: 0-9708275-0-4
Pages: 638