Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 12

A Data Model for the Representation of Fabrication Dependencies Concerning Micromechanical Devices

Authors: U. Hansen and S. Büttgenbach

Affilation: Technical University of Braunschweig, Germany

Pages: 586 - 589

Keywords: MEMS data model, process compatibility, MST CAD, process configuration

Conventionally the design of a product is conducted paying only little attention to the subsequent manufacturing. Regarding micromechanical devices this is not practicable, since the design choices taken are highly dependent on the technology used for fab

ISBN: 0-9708275-0-4
Pages: 638

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