Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 12

System Model for a Novel No Moving Parts Diffuser Valve Based Diaphragm Actuated Micro Pump

Authors: D. Banerjee, K. Yano and S.F. Bart

Affilation: Coventor, United States

Pages: 578 - 581

Keywords: CFD, system-model, macro-model, micropump, compressible flow

Analytical results for oscillating flow in a channel indicate regions of high shear stress close to the wall along with the flow reversal in the central portion of the flow at certain frequencies of actuation. To obviate the huge computational labor and complexity required for an accurate CFD model of an entire micropump, this work describes the formulation of a system model constructed from an extraction of CFD simulation results for compressible and incompressible flows in a no-moving parts diffuser valve for actuation frequencies ranging from 100Hz to 1MHz. The system model was used to predict the optimum frequency of operation from the calculations for flow rate as a function of frequency of actuation of the diaphragm.

ISBN: 0-9708275-0-4
Pages: 638