Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Semiconductor Device Modeling and Novel Structures Simulation Chapter 10

Semi-Empirical Approach to Modeling Reverse Short-Channel Effect in Submicron MOSFET’s

Authors: S.B. Chiah, X. Zhou, K.Y. Lim, Y. Wang, A. See and L. Chan

Affilation: Nanyang Technological University, Singapore

Pages: 486 - 489

Keywords: Reverse short-channel effect, effective channel doping, pile-up charge centroid, submicron MOSFET

A model for effective channel doping in submicron LDD nMOSFET's is presented by adding the effect of the lateral nonuniform pile-up charge centroid to the Gaussian profile with peak doping near the edge of the metallurgical channel. The effect of the pile-up centroid on the threshold voltage parameter extraction is elaborated, from which semi-empirical relationships on all fitting parameters are formulated. Threshold voltage versus gate length data from MEDICI-simulated devices with lateral Gaussian pile-up doping profiles are used for the verification of this model.

ISBN: 0-9708275-0-4
Pages: 638