Authors: W. Fichtner
Affilation: Swiss Federal Institute of Technology, Switzerland
Pages: 1 - 4
Keywords: technology CAD, predictive modeling, process simulation, device simulation, manufacturing CAD
This paper gives an overview of the status of technology computer-aided design (TCAD) as it is used today for research, development and manufacturing projects in the micro- and opto-electronics industry. While the accurate and physics-based simulation of process steps for ultra-scaled silicon technologies is still an area of active research, the simulation of electrical and optical effects has reached a high level of maturity for both Si and non-Si devices.