MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Compact Modeling for Deep Submicron Devices Chapter 7

Modeling of Threshold Voltage with Reverse Short Channel Effect

Authors: K.Y. Lim, X. Zhou and Y. Wang

Affilation: Nanyang Technological University, Singapore

Pages: 317 - 320

Keywords: RSCE, lateral non-uniform profile, threshold voltage, compact model, MOSFET

This paper presents a new reverse short channel effect (RSCE) model for threshold voltage modeling of submicrometer MOSFETs. Unlike those conventional empirically-based RSCE models, the proposed model is derived and simplified based on two Gaussian profiles to simulate boron pile-up at the source and drain edges of nMOS devices. The model has a simple compact form that can be utilized to study and characterize the pile-up profile of advanced halo-implant MOSFETs. The analytical model has been applied to, and verified with, experimental data of a 0.25-mm CMOS process for various channel length and substrate bias conditions.

ISBN: 0-9666135-7-0
Pages: 741