MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 6

3D Thermo-Electro-Mechanical Simulations of Gas Sensors Based on SOI Membranes

Authors: C-C. Lu, D. Setiadi, F. Udrea, W.I. Milne, J.A. Covington and J.W. Gardner

Affilation: Cambridge University, United Kingdom

Pages: 297 - 300

Keywords: solid-state gas sensors, electro-thermal-mechanical simulations, SOI devices, multilayer mem-brane, device optimization

3D thermo-electro-mechanical device simulations are presented of a novel fully CMOS-compatible MOSFET gas sensor operating in a SOI membrane. A comprehensive stress analysis of a Si-SiO2ñbased multilayer membrane has been performed to ensure a high degree of mechanical reliability at a high operating temperature (e.g. up to 400(C). Moreover, optimisation of the layout dimensions of the SOI membrane, in particular the aspect ratio between the membrane length and membrane thickness, has been carried out to find the best trade-off between minimal device power consumption and acceptable mechanical stress.

ISBN: 0-9666135-7-0
Pages: 741

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