MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 6

Analysis of an Electrostatic Microactuator with the Help of Matlab/Simulink: Transient and Frequency Characteristics

Authors: O. Français

Affilation: ELMI, France

Pages: 281 - 284

Keywords: electrostatic, modeling, frequency shifting, numerical method.

The article is focused on the development of a numeric simulator dedicated to the electrostatic microactuator. It's based on the use of Simulink (Matlab „). The electrostatic microactuator is regard as a model <<rigid plate>> associated to a spring with an electrode above. The simulation is based on the mechanical law governing the working. By this way, transient simulation of the electrostatic microactuator can be obtained. The pull in effect is taking into account in the simulation and instability of electrostatic actuation is shown with the influence of the damping factor. The results have been extended to a frequency characterisation in order to highlight the resonant frequency shifting with the polarisation applied on the electrode. This result is supported by a modelisation in small signals mode.

ISBN: 0-9666135-7-0
Pages: 741