MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 6

Modelling of Processes of Photoacoustic Diagnostic with Piezoelectric Detection

Authors: O. Vertsanova, I. Perlov and B. Tsyganok

Affilation: National Technical University of Ukraine, Ukraine

Pages: 249 - 252

Keywords: MEMS, acoustics, hydrophone, resonator, silicon

Authors developed the one-dimensional mathematical model of piezoelectric detection of photoacoustic effect in thermally thick and optically opaque sample with subsurface defect. The model is developed in view of the assumptions of ideally rigid connection piezosensor with sample and free fastening of sensor in a microscope cell. This model allows to investigate thermal and elastic properties of solids and subsurface defects. The model can be applied for decoding of computer photoacoustic images and their further analysis. The presented by authors photoacoustic images suggest the introduction of the PAM technique for the NDE of microcircuits, thin film and microwelded connection.

ISBN: 0-9666135-7-0
Pages: 741