MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multi-Level Simulation Chapter 5

Modeling of High-speed Diamond Microswitch

Authors: P. Schmid, M. Adamschik, S. Ertl and E. Kohn

Affilation: University of Ulm, Germany

Pages: 237 - 240

Keywords: diamond, microswitch

CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based on technological parameters. However FEM simulations are very time consuming, thus a simple model has been developed, allowing fast calculations to predict device performance. Results obtained by the different approaches are given and compared to measured values.

ISBN: 0-9666135-7-0
Pages: 741