MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

Authors: H. Xie, L. Erdman, Q. Jing and G.K. Fedder

Affilation: Carnegie Mellon University, United States

Pages: 181 - 184

Keywords: vertical actuation, NODAS library, behavioral simulation, comb drive, CMOS micromachining process

This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 mm, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library [1]. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.

ISBN: 0-9666135-7-0
Pages: 741