Authors: Y. Chen, Y. Shroff and W.G. Oldham
Affilation: University of California, United States
Pages: 178 - 180
Keywords: controller, phase-lead compensator, comb drive, overshoot, rise time, settling time, transient optimization
The transient performance of electrostatic actuators is important in high-frequency switching operation of MEMS devices . Optimization of the transient behavior of a simple actuator without introduction of controller network or modification of actuator shape has been studied recently [2, 3]. However, it is desirable to further improve the transient performance by electrical or mechanical means. For this purpose, we present a simple electrical phase-lead compensator and a novel shape design of the comb drive (a mechanical phase-lead compensator). Both of them will increase the modulation force impulse to the actuator at the initial stage with little influence on the behavior at the later (settling) stage. Numerical simulation is carried out to show that the rise time can be reduced.
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