MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators

Authors: Y. Chen, Y. Shroff and W.G. Oldham

Affilation: University of California, United States

Pages: 178 - 180

Keywords: controller, phase-lead compensator, comb drive, overshoot, rise time, settling time, transient optimization

The transient performance of electrostatic actuators is important in high-frequency switching operation of MEMS devices [1]. Optimization of the transient behavior of a simple actuator without introduction of controller network or modification of actuator shape has been studied recently [2, 3]. However, it is desirable to further improve the transient performance by electrical or mechanical means. For this purpose, we present a simple electrical phase-lead compensator and a novel shape design of the comb drive (a mechanical phase-lead compensator). Both of them will increase the modulation force impulse to the actuator at the initial stage with little influence on the behavior at the later (settling) stage. Numerical simulation is carried out to show that the rise time can be reduced.

ISBN: 0-9666135-7-0
Pages: 741