MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

HDL-A-Model of a Micromachined Tuning Fork Gyroscope

Authors: J. Eichholz, J. Quenzer, O. Schwarzelbach, M. Weiß and B. Wenk

Affilation: FhG-ISIT, Germany

Pages: 170 - 173

Keywords: HDLA-model, gyroscope, electrical simulations

The HDLA-model presented describes the electrical and mechanical behavior of a micromachined silicon tuning fork gyroscope. This gyro will be excited by electrostatic forces and the Coriolis induced torsion motion will be read out capacitively. To control the behavior of the gyro several control nodes are available. In addition the model includes capacitors for a force feedback operation and for tuning of the torsional resonance frequency. The design of the element is described by 25 mechanical parameters. Verification of the model is done by developing concurrently a mathematical model that solves the differential equations. In addition the simulations are compared with measurement results. The model can be used for operation point analysis, transient and frequency simulations.

ISBN: 0-9666135-7-0
Pages: 741