MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators

Authors: E.H. Francis, R. Kumaran, B.L. Chua and V.J. Logeeswaran

Affilation: National University of Singapore, Singapore

Pages: 154 - 157

Keywords: resonator, electrostatic spring effect, natural frequency, uncertainty analysis, simulation

This paper reports on the significant discrepancy between the analytical and experimental resonant frequencies of the folded beam micro resonators. Experimental results for the resonant frequency showed a consistent 20% discrepancy over theoretical and finite element results. Possible causes of the discrepancy from tapered cross section of the flexure beams, dimensional variations and electrostatic spring effects are discussed and shown to contribut to the significant difference between analytical and experimental values. IntelliCADTM electrostatic simulation was done to isolate the electrostatic spring effect and compared with the experimental observations. The compliance due to AC vltage has also been observed in DRIE resonators.

ISBN: 0-9666135-7-0
Pages: 741