MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

Layout Synthesis of CMOS MEMS Accelerometers

Authors: V. Gupta and T. Mukherjee

Affilation: Carnegie Mellon University, United States

Pages: 150 - 153

Keywords: synthesis, CAD, CMOS MEMS accelerometer

An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped parameter analytical equa-tions. The design problem is then formulated into a non-lin-ear constrained optimization problem. Such an approach to automated design of MEMS devices helps the designer to explore design trade-offs efficiently. Synthesis of cell level devices is also required for structured design of integrated MEMS. Designs for a CMOS MEMS accelerometer for dif-ferent optimization objectives, as well as possible design trade-offs are discussed.

ISBN: 0-9666135-7-0
Pages: 741