Authors: M. Hardtmann, R. Aigner, R. Nadal and G. Wachutka
Affilation: Munich University of Technology, Germany
Pages: 138 - 141
Keywords: methodology, macromodeling, force-feedback, sigma-delta architectures
Design and verification of complete microsystems require effective models of the micromechanical components for the simulation at system level. Particularly for force feedback S/D-architectures, long transient simulations are inevitable to characterize the system-inherent signal pro-cessing. In this paper we present an energy-based method-ology describing a general approach to deriving marco-models of flexible, squeeze-film damped, multi-electrode structures for use in a network simulator. The coupling scheme between the kinematics of the mechanical structure and the electrical field between the electrodes allows to incorporate additional interactions such as squeeze-film damping. The flexibility of our modeling method proves to be particularly valuable for the analysis of mechanically damped eigenmodes. Complete macromodels can be extracted from fully meshed FEM and BEM model data.