MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures

Authors: M. Hardtmann, R. Aigner, R. Nadal and G. Wachutka

Affilation: Munich University of Technology, Germany

Pages: 138 - 141

Keywords: methodology, macromodeling, force-feedback, sigma-delta architectures

Design and verification of complete microsystems require effective models of the micromechanical components for the simulation at system level. Particularly for force feedback S/D-architectures, long transient simulations are inevitable to characterize the system-inherent signal pro-cessing. In this paper we present an energy-based method-ology describing a general approach to deriving marco-models of flexible, squeeze-film damped, multi-electrode structures for use in a network simulator. The coupling scheme between the kinematics of the mechanical structure and the electrical field between the electrodes allows to incorporate additional interactions such as squeeze-film damping. The flexibility of our modeling method proves to be particularly valuable for the analysis of mechanically damped eigenmodes. Complete macromodels can be extracted from fully meshed FEM and BEM model data.

ISBN: 0-9666135-7-0
Pages: 741