MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

System-Level Modeling and Simulation of MEMS Chapter 4

System Level Simulation of an Electrostatically Levitated Disk

Authors: M. Kraft and A. Evans

Affilation: University of Southampton, United Kingdom

Pages: 130 - 133

Keywords: electrostatic levitation, inertial sensors, system-level simulation

This paper describes the derivation of a system-level model for a micromachined disk which is levitated by electrostatic forces. Such a system has many potential applications for inertial sensors, micro-motors, microfluidic and micro-optical devices. As a simulation tool Matlab/Simulink was used since it can easily handle different domains such as electrical and mechanical without special arrangements. Multi-axis electro-mechanical sigma-delta modulators were chosen to control the various degrees of freedom of the levitated disk. Of special interest is the power-up phase at the end of which the control system has to ensure that the disk is centred between the top and bottom electrodes.

ISBN: 0-9666135-7-0
Pages: 741