Papers:
System Level Simulation of an Electrostatically Levitated Disk
This paper describes the derivation of a system-level model for a micromachined disk which is levitated by electrostatic forces. Such a system has many potential applications for inertial sensors, micro-motors, microfluidic and micro-optical devices. As [...]
Compact MEMS Modeling for Design Studies
A method for MEMS macromodel development is presented which is based on a physical device description to obrain mathematical relations for the device operation. Since design and technlogy parameters are input parameters of the resulting [...]
Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures
Design and verification of complete microsystems require effective models of the micromechanical components for the simulation at system level. Particularly for force feedback S/D-architectures, long transient simulations are inevitable to characterize the system-inherent signal pro-cessing. [...]
Towards Microelectrofluidic System (MEFS) Computing and Architecture
Dewey A., Fair R.B., Jopling J., Ding J., Zhang T., Cao F., Schreiner B., Pollack M., Duke University, US
This paper presents the rationale, design, and simulation of next-generation microelectro fluidic system computational architectures for the emerging field of bioinformatics. Current microelectro fluidic processors (e.g. biochips) have largely dedicated architectures supporting relatively specialized applications. [...]
Macro-Modeling of Systems Including Free-Space Optical MEMS
One barrier to the integration of MEMS devices into optical systems is the lack of a system-level CAD tool allowing the optimization of MOEMS designs simultaneously with embedding control electronics. Our work addresses this issue [...]
Layout Synthesis of CMOS MEMS Accelerometers
An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped [...]
Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators
This paper reports on the significant discrepancy between the analytical and experimental resonant frequencies of the folded beam micro resonators. Experimental results for the resonant frequency showed a consistent 20% discrepancy over theoretical and finite [...]
Investigation of the Dynamics of Microdevices – As a Design Tool
When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS [1]. In this work, a [...]
Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects
Compact models for the viscous damping coefficient in narrow air gaps between laterally moving structures are reported. The gas rarefaction effects are included in these small-displacement models. In the first part of the paper, a [...]
Modeling and Optimization of Bi-stable Optical Switch
High performance silicon-based, micro-optical switch are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure [...]
HDL-A-Model of a Micromachined Tuning Fork Gyroscope
The HDLA-model presented describes the electrical and mechanical behavior of a micromachined silicon tuning fork gyroscope. This gyro will be excited by electrostatic forces and the Coriolis induced torsion motion will be read out capacitively. [...]
Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications
In this work a new design of a tunable capacitor based on microelectromechanical system (MEMS) technology is presented. The design of high Q- tunable capacitor has been accomplished through bulk micromachining process with all metal [...]
Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators
The transient performance of electrostatic actuators is important in high-frequency switching operation of MEMS devices [1]. Optimization of the transient behavior of a simple actuator without introduction of controller network or modification of actuator shape [...]
Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0