MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Process Modeling Chapter 2

Modeling of Focused Ion Beam Trimming of Cantilever Beams

Authors: T. Lam and R.B. Darling

Affilation: Univeristy of Washington, United States

Pages: 79 - 82

Keywords: focused ion beam trimming, cantilever beams, finite element method

A finite element model of the cantilever beam is implemented to include a non-uniform thickness along its length, due to focused ion beam trimming. A quasi-static, iterative approach is used to calculate the cantilever profile for a given bias voltage. Two focused ion beam trimming strategies are compared. The snap-down voltage as a function of milling depth or width is calculated.

ISBN: 0-9666135-7-0
Pages: 741

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