Authors: O. Sigmund
Affilation: Technical University of Denmark, Denmark
Pages: 36 - 39
Keywords: actuators, microelectromechanical systems, MEMS, topology optimization, finite element analysis
The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal material redistributions.
Nanotech Conference Proceedings are now published in the TechConnect Briefs