MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 17

Numerical Simulation of Micro Assembly Techniques in MEMS Devices

Authors: N. Finch, D. Keating and Y. He

Affilation: IntelliSense Corporation, United States

Pages: 720 - 722

Keywords: numerical simulation, micro-assembly techniques, MEMS devices

This paper presents research on numerical simulation of the micro-assembly of MEMS devices. Recent developments in MEMS devices ñ making use of multiple deposition layers, micro-fabricated hinges, and actuators ñ have enabled fabrication of MEMS devices that can deform out of plane. Applications include latching mechanisms and tilting mirrors. The simulation methodology has been developed which allows a MEMS designer to take into account the required actuation forces, interfacing mechanisms, and time constraints for micro-assembly. The simulation results rely on multi-stage contact analysis, dynamic analysis, and large displacement theory. Results will be presented for two case examples.

ISBN: 0-9666135-7-0
Pages: 741