Wilson N., Wang K., Yergeau D., Dutton R.W.
Stanford University, US
Keywords: geometry, levelset, MEMS, solid modeling, TCAD
This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry useful in MEMS simulation, it uniquely offers a fully integrated 3-D levelset kernel that permits highly accurate physically based deposition and etching simulation.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 716 - 719
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0