MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 17

CFD-Micromesh: A Fast Geometrical Modeling and Mesh Generation Tool for 3D Microsystem Simulations

Authors: Z. Tan, M. Furmanczyk, M. Turowski and A.J. Przekwas

Affilation: CFD Research Corporation, United States

Pages: 712 - 715

Keywords: TCAD, mesh generation, 3D modeling

In this work, a new fully automated geometrical modeling and meshing tool is described. It imports standard layout formats (CIF, GDSII, DXF), images (GIF, JPG), and 3D boundary representations (STL). A 3D model is then generated by simulating 3D operations (etching, deposition, insertion, etc.) specified by the process data or the user. A 3D finite element mesh with tagged boundary and volume conditions is then automatically created. The automatic generation of 3D model and mesh takes typically a couple of minutes on a current PC machine. The paper will present the geometry/meshing engines, user interfaces, and will demonstrate them on a range of microsystem applications.

ISBN: 0-9666135-7-0
Pages: 741

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