MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 17

Quality Based Design and Design for Reliability of Micro Electro Mechanical Systems (MEMS) Using Probabilistic Methods

Authors: S. Reh, P. Lethbridge and D.F. Ostergaard

Affilation: ANSYS, Inc., United States

Pages: 708 - 711

Keywords: micro-electromechanical-systems (MEMS), finite-element analysis, manufacturing tolerances, probabilistic analysis

The paper demonstrates the use of probabilistic methods to assess the electromechanical behavior of micro electromechanical systems (MEMS) under the presence of micromachining manufacturing and process uncertainties. Probabilistic Methods are used to assess uncertainties involved in the manufacturing of MEMS devices. Probabilistic methods guide the design of these devices to achieve a robust and reliable design in a most efficient way. The methods illustrated here are implemented in the latest version of the ANSYS Finite-Element program.

ISBN: 0-9666135-7-0
Pages: 741