A New Analytical Micromotor Design Models for CAD PC-Design Tools

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This paper presents the elaboration of two PC design tools, using new analytic micromotor design models, towards a fully integrated CAD system for finding optimal structure for small size variable capacitance side-drive micromotors. Accuracy, simplicity, and efficiency are the key advantages of these new models compared with the other models implemented in the same tools. These PC design tools, which have been developed and modified at our department, are presented in this paper. The first, called uTORQUE, is devoted to the design of electromechanical structure based on a simulation procedure of static behavior of the electrostatic micromotors. The second is devoted to simulating the dynamic behavior of the micromotor during its operation based on modified analytical dynamic behavior. Both design tools are based on an analytical model, called the modified parallel plate capacitance model, for drive torque, friction torque, and viscous drag torque calculations. These PC design tools (programs) help us to predict and determine the optimum operational performance characteristics of an electrostatic VC micromotor.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 692 - 695
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0