MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 17

Modeling and Simulation of 3D Structures for Gigabit DRAM

Authors: O. Kwon, S. Yoon, Y. Ban and T. Won

Affilation: Inha University, Korea

Pages: 688 - 691

Keywords: modeling, topography, deposition, etching, process simulation, process integration, parallel computation, DRAM

In this paper, we present a 3D topography simulator, so-called 3D-SURFILER(SURface proFILER), to model a complicated 3D structure on the substrate for gigabit DRAMs. The 3D-SURFILER comprises a deposition and etching simulator employing a cell advancing scheme and a parallel computational numerical engine. An MIM (Metal-Insulator-Metal) stacked capacitor [1] has been chosen to verify the validity of the simulator.

ISBN: 0-9666135-7-0
Pages: 741