MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: Electromagnetics, Optics, Imaging Chapter 16

Modeling and Design of a Micromechanical Phase-Shifting Gate Optical Modulator

Authors: L. Que, G. Witjaksono and Y.B. Gianchandani

Affilation: University of Wisconsin, United States

Pages: 664 - 667

Keywords: phase-shifting gate, MEMS, optical interference effects, optical modulation, reflectivity

This paper reports the modeling and design of a micromechanical optical modulator with a phase-shifting gate that utilizes optical interference effects to modulate light. The gate is opened or closed by microactuators integrated on the same chip, modulating light beams between stationary optical fibers. Modeling results show optimized designs can have high modulation efficiency of 99.5%, and contrast ratio of 23 dB. Alignment between fibers is guaranteed by guiding grooves available in standard MEMS batch fabrication techniques, which also permits coupling distance between fibers to be minimized. The insertion loss for a typical design can be less than ñ1.9 dB. The beam profile shows negligible distortion for 40mm or lower coupling distances.

ISBN: 0-9666135-7-0
Pages: 741

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