MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: Electromagnetics, Optics, Imaging Chapter 16

Analytic and Raytrace Modeling of a Miniaturized Infrared Spectrometer Module

Authors: K. Keränena, M. Blomberg, J. Tenhunena and P. Kariojac

Affilation: VTT Electronics, Finland

Pages: 660 - 663

Keywords: modeling, optimization, miniaturization, spectrometer, module

When designing the construction of an optoelectronic module, the modeling of the system allows for the possibility to optimize geometries, materials and components in order to achieve optimal performance and cost effectiveness for the final product. We use an approach in which an analytical model and simulation model supplement each other in order to speed up and enchance the device development process. Our system integrator approach consists of analytical modeling and raytrace simulation modeling of the system, system realization and system characterization. Our pilot miniaturized system comprised three silicon micromachined devices: an electrically modulated thermal infrared emitter, an electrically tunable Fabry-Perot interferometer (FPI) and a photodetector. Analytic modeling of the system was verified by optical simulation software raytracing. The simulation results were verified by experiments thus enhancing the development of the simulation model.

ISBN: 0-9666135-7-0
Pages: 741