MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: Electromagnetics, Optics, Imaging Chapter 16

Optical Propagation Methodologies for Optical MEM Systems

Authors: T.P. Kurzweg, S.P. Levitan, J.A. Martinez, P.J. Marchand, M.T. Shomsky and D.M. Chiarulli

Affilation: University of Pittsburgh, United States

Pages: 656 - 659

Keywords: MEMS-CAD, optical MEMS, MOEMS, micro-optics

In this paper, we examine optical propagation techniques for modeling and simulating optical MEM systems. We determine an appropriate technique through studying two criteria: the requirements established by the physical properties of these systems and the goal of having an interactive CAD tool. After examining several classical methods, we conclude with the choice of an optical propagation method and the implementation of this method in our free-space opto-electro-mechanical CAD tool, Chatoyant.

ISBN: 0-9666135-7-0
Pages: 741