Authors: T.P. Kurzweg, S.P. Levitan, J.A. Martinez, P.J. Marchand, M.T. Shomsky and D.M. Chiarulli
Affilation: University of Pittsburgh, United States
Pages: 656 - 659
Keywords: MEMS-CAD, optical MEMS, MOEMS, micro-optics
In this paper, we examine optical propagation techniques for modeling and simulating optical MEM systems. We determine an appropriate technique through studying two criteria: the requirements established by the physical properties of these systems and the goal of having an interactive CAD tool. After examining several classical methods, we conclude with the choice of an optical propagation method and the implementation of this method in our free-space opto-electro-mechanical CAD tool, Chatoyant.
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